MCE532 MEMS

[3–0, 3 cr.]

Static and quasistatic fields for microelectromechanical transducers & certain microfluidic schemes. Capacitance models, lumped parameter electromechanics, & two-port device descriptions. Reciprocity & sensitivity issues. Brief review of microfabrication technologies. Case studies of practical micro-actuators & sensor elements.

Pre-requisites: ELE401 Electronics I.